- Title
- Large Displacement Sensing for Comb-drive Actuators Using Suspended Gate Field Effect Transistor
- Creators - without role
- T. W. LinM. T. K. HouR. Chen - 國立清華大學工學院動力機械工程學系
- Publication Details
- Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT 2006) Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT 2006)
- Identifiers
- 9957771930906774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Large Displacement Sensing for Comb-drive Actuators Using Suspended Gate Field Effect Transistor
Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT 2006) Asia-Pacific Conference of Transducers and Micro-Nano Technology(APCOT 2006)
2006
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