Abstract
A novel rapid and green manufacturing technology of metallic and transparent conducting oxide (TCO) patterns on flexible substrate at normal environment is presented. Functional materials are synthesized, deposited, and thermally treated using an economic continuous wave laser digital manufacturing system integrated with a multiphase reactive precursor fluid delivering device. The deposited patterns show excellent electrical conductivity, mechanical and optical properties. Comprehensive analyses on the physics of the microscale transport phenomena were carried out to investigate the coupled photo-thermal-fluid-mass transfer and their effects on the process. The developed model was able to effectively and efficiently optimizing the process parameters that affect the surface morphology, properties and deposition rate of the microstructures. The developed physical model was also integrated with in-situ measurements and intelligent data-driven analysis to monitor, control and optimize the process proactively. This low-carbon processing techniques demonstrated the laser-based micro- and nanoscale green, digital-twin manufacturing for advanced semiconductor devices and electronics.