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Lateral wet oxidation of AlAsSb lattice-matched to GaSb
Conference paper

Lateral wet oxidation of AlAsSb lattice-matched to GaSb

K. Meneou, H. C. Lin, K. Y. Chang, K. C. Hsieh, J. G. Kim and R. Martinelli
2004 Electronic Materials Conference
2004

Abstract

oxidation;lattice-matched

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