Abstract
Although lines, corners, and some arithmetic-progression (AP) and non-AP patterns were successfully evaluated for line edge roughness (LER) and their pattern transfer completeness (PTC), special ink accumulation by printing sequence and direction in inkjet printing was never evaluated before. This work finalized the proposed LER evaluations in inkjet printing for AP and non-AP patterns with advanced algorithms not only for patterns with single and fixed segment, but also for patterns with multiple and varied segments. The successful development of the proposed LER evaluation procedure ensured a quantifiable standard without ambiguity and personal judgment difference. The proposed procedure also indicated and proved the special ink accumulations, which was never scientifically clarified before.