Linewidth vernier (LWV)

Conference paper

Proceedings of SPIE - The International Society for Optical Engineering, Vol.334, pp.255-257

09/1982

Abstract

Electronic

Optical and Magnetic Materials

Condensed Matter Physics

Computer Science Applications

Applied Mathematics

Electrical and Electronic Engineering

1 Record Views

Title: Linewidth vernier (LWV)
Translated title: Linewidth vernier (LWV)
Creators - without role: B.J. Lin - IBM Research - Thomas J. Watson Research Center
Publication Details: Proceedings of SPIE - The International Society for Optical Engineering, Vol.334, pp.255-257
Identifiers: 9957767565706774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Conference paper