Long range, high accuracy absolute distance measurement by improved three-wavelength heterodyne interferometry

Pei-Chi Huang; Shang-Da Yang

doi:10.1109/CLEOPR.2013.6600053

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Conference paper

Long range, high accuracy absolute distance measurement by improved three-wavelength heterodyne interferometry

Pei-Chi Huang and Shang-Da Yang

Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 6600053

2013

DOI: https://doi.org/10.1109/CLEOPR.2013.6600053

Abstract

The complexity and non-ambiguity range (NAR) of the conventional three-wavelength heterodyne interferometry are improved by using one phase modulator and a mapping procedure, respectively. Experiments demonstrated 10-mm NAR and an estimated accuracy of 0.65 nm. © 2013 IEEE.

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Title: Long range, high accuracy absolute distance measurement by improved three-wavelength heterodyne interferometry
Creators - without role: Pei-Chi Huang - National Tsing Hua University
Shang-Da Yang - Institute of Photonics Technologies , National Tsing Hua University
Grant note: IEICE Communications Society (IEICE CS);IEICE Elec
Identifiers: 9781467364751; 9957775342906774
Academic Unit: Institute of Photonics Technologies, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Conference paper
Publication Details: Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 6600053

Long range, high accuracy absolute distance measurement by improved three-wavelength heterodyne interferometry

Abstract

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