Low Temperature synthesis of AlN Films by ICP-assisted Metalorganic Chemical Vapor Deposition Method

Conference paper

Cheng-Hsien Chou, Yung-Chen Lin, Jin-Hua Huang, Nyan-Hua Tai and I-Nan Lin

16th International Symposium on Ferroelectrics 16th International Symposium on Ferroelectrics

2004

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Title: Low Temperature synthesis of AlN Films by ICP-assisted Metalorganic Chemical Vapor Deposition Method
Creators - without role: Cheng-Hsien Chou
Yung-Chen Lin
Jin-Hua Huang
Nyan-Hua Tai - 國立清華大學工學院材料科學工程學系
I-Nan Lin
Identifiers: 9957777085806774
Academic Unit: Institute of Analytical and Environmental Sciences, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: 16th International Symposium on Ferroelectrics 16th International Symposium on Ferroelectrics