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Low-concentration detection of CO2 using suspended silicon waveguides in the mid-IR
Conference paper

Low-concentration detection of CO2 using suspended silicon waveguides in the mid-IR

Pen-Sheng Lin, Arne Quellmalz, Po-Han Huang, Shayan Parhizkar, Nour Negm, Stephan Suckow, Floria Ottonello-Briano, Max C. Lemme, Frank Niklaus and Kristinn B. Gylfason
2022 Conference on Lasers and Electro-Optics, CLEO 2022 - Proceedings, SF4O.1
2022

Abstract

Instrumentation Spectroscopy Biomedical Engineering Electrical and Electronic Engineering Management Monitoring Policy and Law Materials Science (miscellaneous) Acoustics and Ultrasonics Atomic and Molecular Physics and Optics
We show detection of CO 2 concentrations as low as 500 ppm using a suspended silicon photonic mid-IR waveguide. The performance is enabled by the low propagation loss (2.35 ±0.25) dB/cm permitting sensing with waveguides up to 7 cm in length.

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