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Low operation voltage non self-emissive MEMS color filter pixels
Conference paper

Low operation voltage non self-emissive MEMS color filter pixels

Cheng-Yao Lo, Jukka Hast, Olli-Heikki Huttunen, Jarno Petäjä, Johanna Hiitola-Keinänen, Arto Maaninen, Harri Kopola, Hiroyuki Fujita and Hiroshi Toshiyoshi
2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS, pp.116-117
2008

Abstract

Air groove Color filter Fabry-Perot MEMS (micro electro mechanical system) Seesaw effect
A 50% reduction of operation voltage improvement was achieved on a non self-emissive color filter pixels based on MEMS (micro electro mechanical system) Fabry-Perot interference device by minimizing its Newton's rings' size. Newly designed air grooves in spacer layer were proved to be efficient to evacuate air trapped inside pixels which in turn effectively lowered its operation voltage. A seesaw effect was also found if air groove occupied too large area which degrades the operation voltage lowering benefit. © 2008 IEEE.

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