Low temperature growth of carbon nanotube emitters on silicon substrates and ITO glass

Conference paper

S.P. Chen, C.C. Chuang, K.W. Cheng, T.W. Huang, J.H. Huang, C.S. Hsiao and J.C. Kuo

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC, Vol.2003-January, pp.145-146

2003

Abstract

Carbon nanotubes

Chemical vapor deposition

Field emission

Electrical and Electronic Engineering

Condensed Matter Physics

Electronic

Optical and Magnetic Materials

1 Record Views

Title: Low temperature growth of carbon nanotube emitters on silicon substrates and ITO glass
Creators - without role: S.P. Chen - Industrial Technology Research Institute
C.C. Chuang - National Tsing Hua University
K.W. Cheng - Industrial Technology Research Institute
T.W. Huang - Industrial Technology Research Institute
J.H. Huang - National Tsing Hua University
C.S. Hsiao - Industrial Technology Research Institute
J.C. Kuo - Industrial Technology Research Institute
Publication Details: Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC, Vol.2003-January, pp.145-146
Identifiers: 4818195154; 9784818195158; 9957777582106774
Academic Unit: National Tsing Hua University
Language: English
Resource Type: Conference paper