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Low-temperature ordering of FePt by formation of silicides in underlayers
Conference paper   Peer reviewed

Low-temperature ordering of FePt by formation of silicides in underlayers

Chih-Huang Lai, C.C. Chiang and C.H. Yang
Journal of Applied Physics, Vol.97(10), 10H310
15/05/2005

Abstract

A low-temperature ordering of FePt was achieved by introducing dynamic stress. The ordering temperature of FePt was reduced to 300°C by using a Cu underlayer on the HF-cleaned Si (001) substrate. An in-plane coercivity as high as 6900 Oe can be obtained after post-annealing at 300°C. The formation of copper silicide, Cu3 Si, during post-annealing induces a dynamic stress on FePt films, which greatly reduces the ordering temperature. Pt silicides also help to reduce the ordering temperature. The low-temperature ordering of FePt can be realized with SiCu underlayers on glass substrates. © 2005 American Institute of Physics.

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