Low-voltage (~1.3V), Arsenic Free Threshold Type Selector with Ultra High Endurance (> 1011) for High Density 1S1R Memory Array

C.H. Wu; C.M. Lee; Y.S. Chen; H.Y. Lee; E. Ambrosi; C.F. Hsu; S. Vaziri; Y.Y. Chen; C.H. Nien; R.L. Hwang; P.J. Liao; D.H. Hou; Y.-H. Lee; T.Y. Lee; T.C. Chen; M.F. Chang; H.-S.P. Wong; X.Y. Bao

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Conference paper

Low-voltage (~1.3V), Arsenic Free Threshold Type Selector with Ultra High Endurance (> 1011) for High Density 1S1R Memory Array

C.H. Wu, C.M. Lee, Y.S. Chen, H.Y. Lee, E. Ambrosi, C.F. Hsu, S. Vaziri, Y.Y. Chen, C.H. Nien, R.L. Hwang, …

Digest of Technical Papers - Symposium on VLSI Technology, Vol.2021-June

2021

Abstract

Electrical and Electronic Engineering

Low voltage selectors are critical for low power operation of high density non-volatile memories. In this work, selectors based on arsenic free chalcogenide materials are demonstrated with record high endurance over 10 ¹¹ cycles together with threshold voltage ~1.3V and leakage current ~5nA. The enhanced endurance is attributed to suppression of phase separation with more stable amorphous network by proper dopants.

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Title: Low-voltage (~1.3V), Arsenic Free Threshold Type Selector with Ultra High Endurance (> 1011) for High Density 1S1R Memory Array
Translated title: Low-voltage (~1.3V), Arsenic Free Threshold Type Selector with Ultra High Endurance (> 1011) for High Density 1S1R Memory Array
Creators - without role: C.H. Wu - Taiwan Semiconductor Manufacturing Company , Ltd.
C.M. Lee - Taiwan Semiconductor Manufacturing Company , Ltd.
Y.S. Chen - Taiwan Semiconductor Manufacturing Company , Ltd.
H.Y. Lee - Taiwan Semiconductor Manufacturing Company , Ltd.
E. Ambrosi - Taiwan Semiconductor Manufacturing Company , Ltd.
C.F. Hsu - Taiwan Semiconductor Manufacturing Company , Ltd.
S. Vaziri - Taiwan Semiconductor Manufacturing Company (China)
Y.Y. Chen - Taiwan Semiconductor Manufacturing Company , Ltd.
C.H. Nien - Taiwan Semiconductor Manufacturing Company , Ltd.
R.L. Hwang - Taiwan Semiconductor Manufacturing Company , Ltd.
P.J. Liao - Taiwan Semiconductor Manufacturing Company , Ltd.
D.H. Hou - Taiwan Semiconductor Manufacturing Company , Ltd.
Y.-H. Lee - Taiwan Semiconductor Manufacturing Company , Ltd.
T.Y. Lee - Taiwan Semiconductor Manufacturing Company , Ltd.
T.C. Chen - Taiwan Semiconductor Manufacturing Company , Ltd.
M.F. Chang - Taiwan Semiconductor Manufacturing Company , Ltd.
H.-S.P. Wong - Taiwan Semiconductor Manufacturing Company , Ltd.
X.Y. Bao - Taiwan Semiconductor Manufacturing Company , Ltd.
Identifiers: 9784863487802; 9957777110006774
Academic Unit: Institute of Electronics Engineering, College of Electrical Engineering and Computer Science, National Tsing Hua University
Language: English
Resource Type: Conference paper
Publication Details: Digest of Technical Papers - Symposium on VLSI Technology, Vol.2021-June

Low-voltage (~1.3V), Arsenic Free Threshold Type Selector with Ultra High Endurance (> 1011) for High Density 1S1R Memory Array

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