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MEMS- A Technology for Advancements in Aerospace Engineering
Conference paper

MEMS- A Technology for Advancements in Aerospace Engineering

Chih-Ming Ho, Steve Tung, Gwo-Bin Lee, Yu-Chong Tai, Fukang Jiang and Thomas Tsao
35th Aerospace Sciences Meeting and Exhibit, AIAA Paper 97-0545
1997

Abstract

MEMS- A Technology for Advancements in Aerospace E Space and Planetary Science Aerospace Engineering

A technology, Micro-Electro-Mechanical- Systems (MEMS), emerged in the late 1980s which enables us to fabricate mechanical parts on the order of microns. Micromachining technology is suitable for developing new transducers or improving existing transducer designs. Due to the dramatic reduction in size, micro transducers can outperform traditional ones by orders of magnitude. Furthermore, MEMS is a fundamental technology which has the potential to influence advancements in many fields. In the automobile, electronics, bio-medical and television industries, MEMS products have already made appreciable impacts. In this paper, the applications of MEMS for aerodynamic control will be presented.

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