Abstract
Non-volatile mass data storage using MEMS-based actuation and probe-based read/write has great potential to replace conventional semiconductor memories because of the ever achieved high areal density. From the standpoint of system implementation, the complexity for integration of all functional electronics in such a micro disk drive is enormously reduced by using the CMOS-MEMS as the core implementing technology, In this paper, we will present the latest progresses on the MRM-based and the EFM-based storage devices that are currently under development. © 2004 IEEE.