MEMS Fabry-Pérot pixels

Hiroshi Toshiyoshi; Chengyao Lo; Yusuke Taii; Hiroyuki Fujita

doi:10.1109/LEOS.2007.4382388

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Conference paper

MEMS Fabry-Pérot pixels

Hiroshi Toshiyoshi, Chengyao Lo, Yusuke Taii and Hiroyuki Fujita

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, pp.284-285

2007

DOI: https://doi.org/10.1109/LEOS.2007.4382388

Abstract

Novel Coulomb force controlled color display pixels of tunable MEMS (Micro Electro Mechanical System) Fabry-Pérot interferometer structure on flexible PEN (polyethylene naphthalate) substrate have been demonstrated with optical, electrical, and mechanical characteristics. ©2007 IEEE.

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Title: MEMS Fabry-Pérot pixels
Creators - without role: Hiroshi Toshiyoshi - The University of Tokyo
Chengyao Lo - Institute of Industrial Science , University of Tokyo
Yusuke Taii - Tokyo University of Science
Hiroyuki Fujita - The University of Tokyo
Publication Details: Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, pp.284-285
Identifiers: 142440925X; 9781424409259; 9957768500806774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper

MEMS Fabry-Pérot pixels

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