Abstract
We developed a glass nanofluidic device partially integrated PDMS valve. Using it, we successfully demonstrated liquid exchange in a micrometer-size chamber connected with nanochannels. This valve device will be useful for fluidic control in microchannels and nanochannels. Also, the fabrication method of partially PDMS integrated glass device will allow various function of not only valve but also gas penetration, channel deformation, and so on. It will contribute to basic technologies in micro-nanofluidics.