MIM Capacitors With High Capacitance Density and Low Quadratic Voltage Coefficient by Employing Crystalline-TiO2/SiO2 Stacked Dielectric

Conference paper

Chia-Chun Lin, Wei-Yuan Ou, Jia-Rong Wu, Min-Lin Wu, Lun-Lun Chen and Yung-Hsien Wu

International Conference on Solid State Devices and Materials (SSDM) International Conference on Solid State Devices and Materials (SSDM)

2011

Abstract

MIM Capacitors;High Capacitance Density;Low Quadratic Voltage Coefficient;TiO2/SiO2 Stacked Dielectric

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Title: MIM Capacitors With High Capacitance Density and Low Quadratic Voltage Coefficient by Employing Crystalline-TiO2/SiO2 Stacked Dielectric
Creators - without role: Chia-Chun Lin
Wei-Yuan Ou
Jia-Rong Wu
Min-Lin Wu - National Tsing Hua University
Lun-Lun Chen - National Tsing Hua University
Yung-Hsien Wu - 國立清華大學原子科學院工程與系統科學系
Publication Details: International Conference on Solid State Devices and Materials (SSDM) International Conference on Solid State Devices and Materials (SSDM)
Identifiers: 9957767461106774
Academic Unit: Tsing Hua College, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper