MIM Capacitors With Stacked TiO2/Y2O3 Insulator Featuring High Capacitance Density and Low Leakage Current

Conference paper

Chia-Chun Lin, Yao-Chung Hu, Lun-Lun Chen, Min-Lin Wu, Jia-Rong Wu and Yung-Hsien Wu

International Conference on Solid State Devices and Materials (SSDM) International Conference on Solid State Devices and Materials (SSDM)

2010

Abstract

MIM Capacitors;TiO2/Y2O3 Insulator;High Capacitance Density;Low Leakage Current

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Title: MIM Capacitors With Stacked TiO2/Y2O3 Insulator Featuring High Capacitance Density and Low Leakage Current
Creators - without role: Chia-Chun Lin
Yao-Chung Hu
Lun-Lun Chen - National Tsing Hua University
Min-Lin Wu - National Tsing Hua University
Jia-Rong Wu
Yung-Hsien Wu - 國立清華大學原子科學院工程與系統科學系
Identifiers: 9957776303206774
Academic Unit: Tsing Hua College, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: International Conference on Solid State Devices and Materials (SSDM) International Conference on Solid State Devices and Materials (SSDM)