MIM Capacitors with High Capacitance Density and Low Quadratic Voltage Coefficient Employing Canceling Effect by ZrLaOx/ZrTiOx/ZrLaOx Laminate Insulator

Conference paper

Lun-Lun Chen, Yu-Bo Lin, Chia-Chun Lin, You-Tai Chang and Yung-Hsien Wu

International Conference on Solid State Devices and Materials (SSDM) International Conference on Solid State Devices and Materials (SSDM)

2012

Abstract

MIM Capacitors;High Capacitance Density;Low Quadratic Voltage Coefficient;Canceling Effect;Laminate Insulator

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Title: MIM Capacitors with High Capacitance Density and Low Quadratic Voltage Coefficient Employing Canceling Effect by ZrLaOx/ZrTiOx/ZrLaOx Laminate Insulator
Creators - without role: Lun-Lun Chen - National Tsing Hua University
Yu-Bo Lin
Chia-Chun Lin - National Tsing Hua University
You-Tai Chang
Yung-Hsien Wu - 國立清華大學原子科學院工程與系統科學系
Identifiers: 9957771967406774
Academic Unit: Tsing Hua College, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: International Conference on Solid State Devices and Materials (SSDM) International Conference on Solid State Devices and Materials (SSDM)