Abstract
A second-generation capped deep-uv portable conformable masking system is described. Two major improvements of this system are: (1) The replacement of the PMMA bottom layer with the PMMA-MA-MAN terpolymer which has a higher thermal stability and a higher deep-uv sensitivity. (2) The application of the mold hardening process to eliminate the 'wings' protruding from the novolac-terpolymer interface, to facilitate a better choice of developers for the bottom layer, and to provide a better refractive index match between the novolac image lines.