Abstract
We propose and develop a new bio-particles manipulation device that has the similar size order as targeted bio-objects and is a non-contact approach to bio-objects using AC electrokinetics. We use micro pyramid array made by MEMS KOH anisotropic etch in our design. Simulation results using CFD-ACE+ and ANSYS show extremely high electric field around micro pyramids for our concept proof. Experimental results successfully demonstrate the feature of micro-object manipulation for our device. In this paper, we will present the design, fabrication, modeling, simulation, and testing results of our manipulation device using electrokinetic force. Copyright © 2004 by ASME.