Abstract
Well aligned CNTs on Ni/Ti/Si substrate were presented in this paper by the employment of pre-annealing process to the adhesive layer(Ti). SEM images show both the alignment and uniformity of the CNTs on pre-annealed substrates are better than that on non-treated substrate. The wall structures of the CNTs were also characterized and demonstrated different organizations. By this pre-annealing process, better current density could be achieved for the wellaligned CNTs from cyclic voltammetry test.. © 2008 IEEE.