- Title
- Manufacturing Intelligence and Feedback Control for Semiconductor Yield Enhancement
- Creators - without role
- C.-Y. HsuChen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系Y. ChenG. Chou
- Publication Details
- The 21st International Conference on Flexible Automation and Intelligent Manufacturing The 21st International Conference on Flexible Automation and Intelligent Manufacturing
- Identifiers
- 9957766322806774
- Academic Unit
- Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Manufacturing Intelligence and Feedback Control for Semiconductor Yield Enhancement
The 21st International Conference on Flexible Automation and Intelligent Manufacturing The 21st International Conference on Flexible Automation and Intelligent Manufacturing
2011
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