- Title
- Manufacturing Intelligence for Effective Chemical Vapor Deposition Clean Effect Compensation for Advanced Process Control
- Creators - without role
- K.-Y. LinC.-Y. HsuChen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系Y.-H. YehJ.-L. Wen
- Publication Details
- the 7th International Conference on Intelligent Manufacturing and Logistics Systems the 7th International Conference on Intelligent Manufacturing and Logistics Systems
- Identifiers
- 9957766233206774
- Academic Unit
- Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Manufacturing Intelligence for Effective Chemical Vapor Deposition Clean Effect Compensation for Advanced Process Control
the 7th International Conference on Intelligent Manufacturing and Logistics Systems the 7th International Conference on Intelligent Manufacturing and Logistics Systems
2011
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