- Title
- Manufacturing Intelligence for Optimizing KLA Inspection Sampling Plan in Semiconductor Manufacturing
- Creators - without role
- Y.-C. LiY.-J. ChenChen-Fu Chien - 國立清華大學工學院工業工程與工程管理學系JH ChungHF HungCJ ChiangC.-C. Chien
- Publication Details
- Proceedings of 9th International Conference on Intelligent Manufacturing and Logistics Systems & 2013 International Symposium on Semiconductor Manufacturing Intelligence (IML2013&ISMI2013) Proceedings of 9th International Conference on Intelligent Manufacturing and Logistics Systems & 2013 International Symposium on Semiconductor Manufacturing Intelligence (IML2013&ISMI2013)
- Identifiers
- 9957774315606774
- Academic Unit
- Department of Industrial Engineering and Engineering Management, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Manufacturing Intelligence for Optimizing KLA Inspection Sampling Plan in Semiconductor Manufacturing
Proceedings of 9th International Conference on Intelligent Manufacturing and Logistics Systems & 2013 International Symposium on Semiconductor Manufacturing Intelligence (IML2013&ISMI2013) Proceedings of 9th International Conference on Intelligent Manufacturing and Logistics Systems & 2013 International Symposium on Semiconductor Manufacturing Intelligence (IML2013&ISMI2013)
2013
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