Measurement of Toxic Volatile Organic Compounds in Indoor Air of Semiconductor Factories using Multisorbent Adsorption/Thermal Desorption Coupled with GC-MS

Conference paper

C. H. Wu, M. N. Lin, C. T. Feng and J. G. Lo

HTC-7 Symposium HTC-7 Symposium

2002

Abstract

Toxic Volatile Organic Compounds;Semiconductor Factories;Multisorbent Adsorption/Thermal Desorption;GC-MS

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Title: Measurement of Toxic Volatile Organic Compounds in Indoor Air of Semiconductor Factories using Multisorbent Adsorption/Thermal Desorption Coupled with GC-MS
Creators - without role: C. H. Wu - 國立清華大學原子科學院生醫工程與環境科學系
M. N. Lin
C. T. Feng
J. G. Lo
Identifiers: 9957772651506774
Academic Unit: Institute of Analytical and Environmental Sciences, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: HTC-7 Symposium HTC-7 Symposium