- Title
- Mechanical Property Effects of Si1-xGex Channel and Stressed CESL on Nano-Scaled nMOSFETs
- Creators - without role
- C. C. Lee - 國立清華大學工學院動力機械工程學系C. H. LiuH. W. HsuZ. H. ChenH. H. TengY. J. Lai
- Publication Details
- 8th International Conference on Silicon Epitaxy and Heterostructures (ICSI-8) 8th International Conference on Silicon Epitaxy and Heterostructures (ICSI-8)
- Identifiers
- 9957768422906774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Mechanical Property Effects of Si1-xGex Channel and Stressed CESL on Nano-Scaled nMOSFETs
8th International Conference on Silicon Epitaxy and Heterostructures (ICSI-8) 8th International Conference on Silicon Epitaxy and Heterostructures (ICSI-8)
2013
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