Abstract
TiN films are prepared by reactive rf magnetron sputtering on carbon steel substrates which are widely applied as structural materials. The electroless Ni-P plating is introduced as an interlayer in the surface modification of TiN coating. The electroless Ni-P deposit crystallizes during rf sputtering due to the elevated sputtering temperature and thus a TiN/Ni 3 P/Fe coating assembly is formed. The employment of electroless Ni-P deposit results in an increase in the surface microhardness of bulk TiN can be achieved in the Ni 3 P interlayer modified TiN coating. With respect to the wear-resistance, the adhesion of the TiN coating plays an important role for the sliding wear-resistance and the interlayer Ni 3 P acts as a hard barrier instead of the soft carbon steel substrate.