Abstract
Ammonia in cleanroom air affects reactivity of some photoresist and deteriorates quality of photo-patterning. Therefore, a portable and continuous monitoring system with 1 ppb sensitivity is required. Previously, we have reported ammonia extraction involving 17 times concentration utilizing parallel two-phase microflow and reaction detection in each microchip [1]. Here, we combined the extraction and reaction detection parts in a microchip. We utilized an annular gas-liquid microflow to enhance the extraction. We realized a continuous detection of ammonia with a limit of detection of 2.9 ppb ammonia, namely 29 ppt ammonia gas in a microchip. Further more, we developed an automatic portable prototype system. © 2009 CBMS.