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Micro silicon hot-wire anemometer
Conference paper

Micro silicon hot-wire anemometer

Martin Mischler, Fan-Gang Tseng, Umberto Ulmanella, Chih-Ming Ho, Fukang Jiang and Yu-Chong Tai
IEEE Region 10 Annual International Conference, Proceedings/TENCON, pp.20-23
1995

Abstract

A new micromachined hot-wire anemometer has been developed. Extensive tests of the anemometer's dependence on ambient temperature, over-heat ratio, and sensor length have been finalized. Due to its extremely small size, micromachined hot-wire has better sensitivity, temporal and spatial resolutions than the conventional hot-wire. Because of the large bandwidth (Mhz), velocity fluctuations at high Reynolds number flow can be measured.

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