Micromachined oxygen gas sensors based on li-doped tin oxide and micro-heater for microscopic energy consumption measurement systems

Conference paper

Ching-Hsing Luo, 國賓李, Chien-Chung Wu and Mei-Hsing Chen

The 1st International Meeting on Microsensors & Microsystems (IMμ2 )

2003

Abstract

Micromachined oxygen gas sensors based on li-doped

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Title: Micromachined oxygen gas sensors based on li-doped tin oxide and micro-heater for microscopic energy consumption measurement systems
Translated title: Micromachined oxygen gas sensors based on li-doped tin oxide and micro-heater for microscopic energy consumption measurement systems
Creators - without role: Ching-Hsing Luo
國賓李
Chien-Chung Wu
Mei-Hsing Chen
Identifiers: 9957766867706774
Academic Unit: Institute of Biomedical Engineering, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper
Publication Details: The 1st International Meeting on Microsensors & Microsystems (IMμ2 )