- Title
- Microstructure evolution of CrAlSiN/W2N superlattice coatings deposited by DC magnetron sputtering
- Creators - without role
- Y.Z. TsaiJ.G. Duh - 國立清華大學工學院材料科學工程學系
- Identifiers
- 9957777146806774
- Academic Unit
- National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
- Publication Details
- 2008 The International Conference on Metallurgical Coatings and Thin Films 2008 The International Conference on Metallurgical Coatings and Thin Films
Conference paper
Microstructure evolution of CrAlSiN/W2N superlattice coatings deposited by DC magnetron sputtering
2008 The International Conference on Metallurgical Coatings and Thin Films 2008 The International Conference on Metallurgical Coatings and Thin Films
2008
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