Abstract
We present an electronically-controlled vanadium dioxide (VO 2 )-based millimeter-wave phase modulator. The phase modulator consists of a resonant meta-surface fabricated on a thin VO 2 film integrated with a voltage-controlled heating electrode layer. By varying the applied voltage to the heating electrodes we control the electromagnetic properties of the VO 2 layer and shift the resonance frequency of the mata-surface, which results in a significant phase shift near the resonance frequency. Using the presented phase modulator design, we experimentally demonstrate the highest reported phase modulation of 60° at 85 GHz through a fully-integrated voltage-controlled device platform.