Abstract
Magnetic resonance components, including gradient coils and RF coils, are miniaturized using a MEMS batch fabrication process and are combined with a 0.18μm CMOS RF transceiver front-end to implement a compact imaging system. The system aims for a resolution of 6×6μm 2 in a 120μm slice. The system could replace high-cost MRI counterparts for micron-resolution 3D images of live cells and enable a desktop cellular MRI system. © 2007 IEEE.