Abstract
This paper presents a novel process to fabricated MoS2 gas sensor. We use dielectrophoresis force (DEP) to manipulate MoS2 nano flakes, and assemble them onto the Au nano electrode, which was fabricated by focused ion beam. Compared to the traditional process, such as CVD, dielectrophoretic assembly has the advantages of ease of fabrication, room-temperature process, localized precise material deposition, and rapid process. In this study, we realize on-chip gas sensors based on dielectrophoretically-assembled MOS2 for vapor sensing. From the characterization, the developed MoS2 nanosensors exhibit excellent signal-to-noise ratio compared to other nanomaterial-based nanosensors, such as graphene and TiO2 nanowire.