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Mobility Degradation Induced by Substrate-Hot-Electron Generated Interface Traps at Different Stress Voltages and Temperatures
Conference paper

Mobility Degradation Induced by Substrate-Hot-Electron Generated Interface Traps at Different Stress Voltages and Temperatures

C. C.-H. Hsu and C.-J. Lin
International Conference on Solid State Devices and Materials International Conference on Solid State Devices and Materials, p.476
1993

Abstract

Substrate-Hot-Electron;Voltages
The electron mobility degradation due to interface traps generated by substrate-hot-electrons injected from a Buried Junction Injector (BJI) structure is investigated. It is the first time to observe the interface trap induced mobility degradation is independent of the stress voltages but is a strong function of the temperatures during substrate-hot-electron stress. Direct linear relationship between mobility degradation and hot-electron generated interface traps is obtained.

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