Modelization and Characterization of Electro-Thermal Bent-Beam Actuators

Conference paper

國賓李, Chen-Sho Shey, Han-I Tsai, Rong-Sheng Chan and Jey Kuan

First Cross-Strait Symposium on Microsystem Technologies

2000

Abstract

Modelization and Characterization of Electro-Therm

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Title: Modelization and Characterization of Electro-Thermal Bent-Beam Actuators
Translated title: Modelization and Characterization of Electro-Thermal Bent-Beam Actuators
Creators - without role: 國賓李
Chen-Sho Shey
Han-I Tsai
Rong-Sheng Chan
Jey Kuan
Publication Details: First Cross-Strait Symposium on Microsystem Technologies
Identifiers: 9957769443406774
Academic Unit: Institute of Biomedical Engineering, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper