Abstract
There is a continuing need for detailed measurement of the performance of various MEMS devices. MEMS devices have been applied in fields like medical instrument, computer chip cooling, and propulsion for satellite etc. The physical phenomena at the micro scale are different from the macro scale and are important to characterize. Most of the sensors applied to MEMS devices measurement have limited resolution restricted by the sensor size and device geometry. Molecular sensors are options for global distribution measurement in MEMS devices. They can be used to obtain temperature, heat transfer, pressure, and shear stress distribution. The application range for the PSP (pressure sensitive paint) sensor is from 1xl0 -5 to 2atm, and the temperature range for TSP (temperature sensitive paint) sensor is from -196 to 200C with good spatial resolution.