Monolithic 3D BEOL FinFET switch arrays using location-controlled-grain technique in voltage regulator with better FOM than 2D regulators

Ping-Yi Hsieh; Yi-Jui Chang; Pin-Jun Chen; Chun-Liang Chen; Chih-Chao Yang; Po-Tsang Huang; Yi-Jing Chen; Chih-Ming Shen; Yu-Wei Liu; Chien-Chi Huang; Ming-Chi Tai; Wei-Chung Lo; Chang-Hong Shen; Jia-Min Shieh; Da-Chiang Chang; Kuan-Neng Chen; Wen-Kuan Yeh; Chenming Hu

doi:10.1109/IEDM19573.2019.8993441

Conference paper

Monolithic 3D BEOL FinFET switch arrays using location-controlled-grain technique in voltage regulator with better FOM than 2D regulators

Ping-Yi Hsieh, Yi-Jui Chang, Pin-Jun Chen, Chun-Liang Chen, Chih-Chao Yang, Po-Tsang Huang, Yi-Jing Chen, Chih-Ming Shen, Yu-Wei Liu, Chien-Chi Huang, …

Technical Digest - International Electron Devices Meeting, IEDM, Vol.2019-December, 8993441

12/2019

DOI: https://doi.org/10.1109/IEDM19573.2019.8993441

Appears in keyword about Physics

Abstract

Electronic

Optical and Magnetic Materials

Condensed Matter Physics

Electrical and Electronic Engineering

Materials Chemistry

Monolithic 3D back-end of line (BEOL) FinFET switch arrays are demonstrated in large single crystalline Si islands (2.56 μm ² ), whose location, size and shape are determined by design. Details of the improved location-controlled-grain (LCG) technique are presented. A voltage regulator implemented with the BEOL switch arrays using external control signals shows better theoretical figure of merit (FOM) of 0.089ns than 2D voltage regulators of 0.43ns.

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Title: Monolithic 3D BEOL FinFET switch arrays using location-controlled-grain technique in voltage regulator with better FOM than 2D regulators
Translated title: Monolithic 3D BEOL FinFET switch arrays using location-controlled-grain technique in voltage regulator with better FOM than 2D regulators
Creators - without role: Ping-Yi Hsieh - Taiwan Semiconductor Manufacturing Company (Taiwan)
Yi-Jui Chang - National Yang Ming Chiao Tung University
Pin-Jun Chen - National Yang Ming Chiao Tung University
Chun-Liang Chen - National Chiao Tung University
Chih-Chao Yang - Taiwan Semiconductor Manufacturing Company (Taiwan)
Po-Tsang Huang - National Yang Ming Chiao Tung University
Yi-Jing Chen - National Chiao Tung University
Chih-Ming Shen - Taiwan Semiconductor Manufacturing Company (Taiwan)
Yu-Wei Liu - National Chiao Tung University
Chien-Chi Huang - National Yang Ming Chiao Tung University
Ming-Chi Tai - Industrial Technology Research Institute
Wei-Chung Lo - Electronics and Optoelectronics System Research Laboratories , Industrial Technology Research Institute
Chang-Hong Shen - Taiwan Semiconductor Research Institute
Jia-Min Shieh - Taiwan Semiconductor Research Institute
Da-Chiang Chang - Taiwan Semiconductor Research Institute
Kuan-Neng Chen - Taiwan Semiconductor Research Institute
Wen-Kuan Yeh - Taiwan Semiconductor Manufacturing Company (Taiwan)
Chenming Hu - National Yang Ming Chiao Tung University
Identifiers: 9781728140315; 9957775440906774
Academic Unit: College of Semiconductor Research, National Tsing Hua University
Language: English
Resource Type: Conference paper
Publication Details: Technical Digest - International Electron Devices Meeting, IEDM, Vol.2019-December, 8993441

Monolithic 3D BEOL FinFET switch arrays using location-controlled-grain technique in voltage regulator with better FOM than 2D regulators

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