Abstract
This study presents the monolithic integration of MOS (metal-oxide-semiconductors) type gas sensor, humidity sensor, and thermometer with better thermal management on chip (Fig. 1), based on the TSMC 0.18 μm 1P6M CMOS platform. Features of this study are: (1) Monolithic integration of air-based humidity, temperature, and MOS type gas sensors, (2) gas sensor with vertically integrated thermal isolation Si cavity to isolate the high operating temperature and decrease the thermal coupling effect among sensors during gas sensing. Measurement results demonstrate that the proposed environment sensing hub with the thermal management design: the sensitivity of humidity sensor is 0.012%/%RH, and the signal drift of thermometer is decreased from 29.11% to 1.04%. Moreover, the MOS type gas sensor is with the sensitivity of 0.072%/% (sensing range: 16-50%) under 180°C.