Morphology Properties and Oxidation Behavior of Reactively Sputtered Cr-N Films

Conference paper

J.G. Duh and R.J. Tu

International Conference on Metallurgical Coating and Thin Films International Conference on Metallurgical Coating and Thin Films

2000

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Title: Morphology Properties and Oxidation Behavior of Reactively Sputtered Cr-N Films
Creators - without role: J.G. Duh - 國立清華大學工學院材料科學工程學系
R.J. Tu
Identifiers: 9957769476206774
Academic Unit: National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: International Conference on Metallurgical Coating and Thin Films International Conference on Metallurgical Coating and Thin Films