Multi tips atomic force microscopy for dynamic nanomovement detection

Y.K. Chiou; J.M. Chang; Y.C. Chen; F.G. Tseng; P.C. Wang

doi:10.1109/TRANSDUCERS.2015.7181198

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Conference paper

Multi tips atomic force microscopy for dynamic nanomovement detection

Y.K. Chiou, J.M. Chang, Y.C. Chen, F.G. Tseng and P.C. Wang

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, pp.1413-1416

05/08/2015

DOI: https://doi.org/10.1109/TRANSDUCERS.2015.7181198

Abstract

Atomic fore microscope (AFM)

high speed/resolution dynamic nanodetection

multi nano tip structures

In this paper, we nano-engineered commercial atomic force microscope (AFM) probes with multi nano tip structures for high speed/resolution dynamic nanodetection. The tip radius could be shrunk down to 2.5 nm, and the time resolution could be approaching 10 ms for measuring particle movement. The multi tip AFM can be applicable for detecting the dynamic movement of bio-molecules in situ.

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Title: Multi tips atomic force microscopy for dynamic nanomovement detection
Creators - without role: Y.K. Chiou - National Tsing Hua University
J.M. Chang - Institute of Nuclear Energy Research
Y.C. Chen - National Tsing Hua University
F.G. Tseng - National Tsing Hua University
P.C. Wang - National Tsing Hua University
Publication Details: 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, pp.1413-1416
Identifiers: 9781479989553; 9957769503106774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: English
Resource Type: Conference paper

Multi tips atomic force microscopy for dynamic nanomovement detection

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