- Title
- Multiprincipal-Element AlCrTaTiZr-Nitride Nanocomposite Film of Extremely High Thermal Stability as Diffusion Barrier for Cu Metallization
- Creators - without role
- Dao-Sheng ChenMing-Ku ChenShou-Yi Chang - 國立清華大學工學院材料科學工程學系
- Publication Details
- Proceedings of the Symposium “E5—Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10” of the 215th ECS Meeting Proceedings of the Symposium “E5—Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10” of the 215th ECS Meeting, Vol.19(2), pp.751-762
- Identifiers
- 9957771391206774
- Academic Unit
- Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Multiprincipal-Element AlCrTaTiZr-Nitride Nanocomposite Film of Extremely High Thermal Stability as Diffusion Barrier for Cu Metallization
Proceedings of the Symposium “E5—Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10” of the 215th ECS Meeting Proceedings of the Symposium “E5—Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 10” of the 215th ECS Meeting, Vol.19(2), pp.751-762
2009
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