Nano-Oxidation Kinetics of Titanium Nitride Films

Conference paper

S. Gwo, T.-T. Lian, Y.-C. Chou and T. T. Chen

The Croucher Advanced Study Institute: Physics and Chemistry of Nano-structured Materials, p.60

1999

Abstract

Nano-Oxidation Kinetics;Titanium Nitride Films

1 Record Views

Title: Nano-Oxidation Kinetics of Titanium Nitride Films
Creators - without role: S. Gwo - 國立清華大學理學院物理學系
T.-T. Lian
Y.-C. Chou
T. T. Chen
Identifiers: 9957773743706774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper
Publication Details: The Croucher Advanced Study Institute: Physics and Chemistry of Nano-structured Materials, p.60