- Title
- Nano-Structure Fabrication on the Nitride Films by Automatic Scanning Probe Oxidation
- Creators - without role
- B. J. WenC. C. Lee - 國立清華大學工學院動力機械工程學系C. P. Hsieh
- Identifiers
- 9957775855606774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
- Publication Details
- 12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015) 12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
Conference paper
Nano-Structure Fabrication on the Nitride Films by Automatic Scanning Probe Oxidation
12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015) 12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015)
2015
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