Abstract
To execute chemical experiments with less sample volume, shorter experiment time and higher measurement resolution, the authors are developing a quartz-chip laboratory with a thermal lens microscope. However, turbulence of fluid flow causes double-count measurement error of microparticles. To increase preciseness of the measurement, a narrow lamina-flow channels called `nano-channel' is employed. Nano-channels of 50 and 900 nm width, flat-structured ball mixer and bubble pump/valve were designed and fabricated on a quartz substrate to estimate their feasibilities.