Abstract
Femtolitter scale liquid (droplet in air) generation and handling methods by pressure-driven flow are essential for next analytical and bio technologies (e.g. pL scale single cell analysis). However, it was difficult to integrate valve function in nanofluidic systems due to the extremely small volume. Here, we report the integration of a chemical valve, Laplace valve, by developing nanoscale superhydrophobic patterning method. As a proof of concept, 1.7 fL water droplets were successfully generated and driven by air pressure.