Abstract
In this study, we implemented a nanochannel open/close valve utilizing glass deformation into a nanofluidic device. Previously, we succeeded in principle verification of the valve fabricated on a thin glass sheet [1], but in this form integration into devices is difficult. Therefore, we fabricated the valve on a glass substrate, which can be used for nanofluidic devices, by making a 30 µm thickness on a small part of the substrate for the valve working. We verified the operation of the fabricated valve and achieved a pressure capacity over 400 kPa, which is sufficient for nanofluidic analytical applications.