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Nanocomposite rubber elastomer with piezoresistive detection for flexible tactile sense application
Conference paper

Nanocomposite rubber elastomer with piezoresistive detection for flexible tactile sense application

J.-J. Wang, C.-E. Lu, J.-L. Huang, R. Chen and W. Fang
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp.720-723
02/2017

Abstract

Electronic Optical and Magnetic Materials Condensed Matter Physics Mechanical Engineering Electrical and Electronic Engineering
This work presents flexible tactile sensor using piezoresistive nanocomposite rubber elastomers (C-PDMS): Carbon-black (C) powders filled into polymethylsiloxane (PDMS) using solvent-wetting methods with n-Hexane to produce well-dispersed conductive polymeric nanocomposites. The C-PDMS nanocomposites are utilized to measure resistance changes. In application, the C-PDMS is casted and stacked into PDMS substrate and gold films deposited with 3-mercaptopropyltrimethoxysilane (MPTMS) adhesion layers as bond pads to implement the flexible polymer-based devices. Typical normal load tests show resistance changes of C-PDMS piezoresistors on flat surface are ranging 2.92%∼4.45% (ΔR/R 0 /mN). Moreover, resistance changes of C-PDMS piezoresistors on curved surface are ranging 0.92%∼0.98% (ΔR/R 0 /mN).

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