Nanoscratch Characteristics of Annealed Si/SiGe Superlattices

Conference paper

Nanoscratch Characteristics of Annealed Si/SiGe Superlattices

M. J. Wu, M. H. Lin, W. F. Wu and C. P. Chou

2011

Abstract

Superlattices;Ultrahigh-vacuum chemical vapor deposition;Atomic force microscopy;Transmission electron microscopy

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Title: Nanoscratch Characteristics of Annealed Si/SiGe Superlattices
Creators - without role: M. J. Wu
M. H. Lin
W. F. Wu - 國立清華大學原子科學院工程與系統科學系
C. P. Chou
Identifiers: 9957774405906774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper